HBO 1500W/PIL 6/CS 1/SKU
Product features and benefits
- High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
- Designed for long lasting performance
- Qualified with ASML
Areas of application
- Microlithography
Safety advice
Because of their high luminance, UV radiation and high internal pressure (when hot) HBO lamps may only be operated in enclosed lamp casings specially constructed for the purpose. Mercury is released if the lamp breaks. Special safety precautions must be taken. More information is available on request or can be found in the leaflet included with the lamp or in the operating instructions.
Because of their high luminance, UV radiation and high internal pressure (when hot) HBO lamps may only be operated in enclosed lamp casings specially constructed for the purpose. Mercury is released if the lamp breaks. Special safety precautions must be taken. More information is available on request or can be found in the leaflet included with the lamp or in the operating instructions.
Technical Data
General Product Information
Global order reference
HBO 1500W/PIL
Product number (Americas)
69181
Product name (Americas)
HBO 1500W/PIL 6/CS 1/SKU
Family brand
HBO
Lamp type
DOUBLE ENDED
General description
1,500 watt, mercury short arc, double-ended lamp for semiconductor ,applications in ASML PAS2500/22, PAS5500/100C,/100D stepper(s
)
Electrical Data
Nominal wattage
1500 W
Nominal voltage
23.0 V
Nominal current
65 A
Type of current
DC
Photometric Data
Light center length (LCL)
118.0 mm
Physical Attributes & Dimensions
Electrode gap (cold)
4.0 mm
Base (anode)
SFc30-6/25
Base (cathode)
SFc27-10/35
Diameter
46.0 mm
Diameter (in)
1.811 in
Length
273.0 mm
Length with base excl. base pins/connection
240.00 mm
Product weight
672.00 g
Operating Conditions
Burning position
Other
Cooling
Forced
Lifetime Data
Nominal lifetime
1500 hr
Environmental & Regulatory Information
Information according Art. 33 of EU Regulation (EC) 1907/2006 (REACh)
Primary article identifier
4050300967103 | 4050300461465
Date of declaration
09-07-2024
Declaration no. in SCIP database
910a2e30-b741-4571-8470-190c5ee7888d|e22d7304-fdce-45fd-8d2a-6aa5291d1a5b
Candidate list substance 1
Lead
CAS No. of substance 1
7439-92-1
Safe use instruction
The identification of the Candidate List substance is sufficient to allow safe use of the article.
Packaging information
Product number |
EAN/UPC |
Packaging |
Quantity |
Outside dimensions l x w x h |
Gross weight |
|---|---|---|---|---|---|
| 69181 | 4050300461465 | TUBE | 1 | 15.1in x 7.7in x 6.3in | 2.8lb |
| 69181 | 4050300461472 | SHIPPING BOX | 6 | 20.1in x 16.5in x 16.5in | 19lb |